JPS622236U - - Google Patents
Info
- Publication number
- JPS622236U JPS622236U JP9282585U JP9282585U JPS622236U JP S622236 U JPS622236 U JP S622236U JP 9282585 U JP9282585 U JP 9282585U JP 9282585 U JP9282585 U JP 9282585U JP S622236 U JPS622236 U JP S622236U
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- opening
- gas source
- housing chamber
- exhaust pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000004308 accommodation Effects 0.000 claims 1
- 238000001816 cooling Methods 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9282585U JPS622236U (en]) | 1985-06-19 | 1985-06-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9282585U JPS622236U (en]) | 1985-06-19 | 1985-06-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS622236U true JPS622236U (en]) | 1987-01-08 |
Family
ID=30649965
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9282585U Pending JPS622236U (en]) | 1985-06-19 | 1985-06-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS622236U (en]) |
-
1985
- 1985-06-19 JP JP9282585U patent/JPS622236U/ja active Pending